AlixLabs

AlixLabs is a Swedish semiconductor equipment company pioneering Atomic Pitch Splitting (APS™), an atomic layer etch-based patterning technology designed to simplify advanced chip manufacturing in the Ångström era. Based in Lund, Sweden, AlixLabs develops dry etch solutions that help chipmakers reduce patterning complexity, improve critical dimension control, and support continued scaling for advanced logic and memory devices.
APS™ is designed to complement existing lithography and etch flows, offering a deposition-free approach to pitch splitting that can reduce reliance on increasingly complex multi-patterning schemes. As Taiwan’s semiconductor ecosystem continues to lead in advanced manufacturing, AlixLabs aims to support foundries, memory manufacturers, equipment partners, and process integration teams with practical solutions for more cost-efficient scaling.
With Sax Forma, its first commercial APS™ system, AlixLabs is entering deeper customer engagement, process integration, and industrial deployment.

 

Technology Highlights

• APS™ demonstrated on 300 mm UMC and Intel wafers, demonstrating pitch splitting without EUV lithography.
• Atomic layer etch-based pitch splitting designed to reduce multi-patterning complexity.
• Compatible with existing lithography and etch flows for practical fab integration.
• Supports sub-10 nm patterning potential with atomic-scale precision.
• Winner of the IC Taiwan Grand Challenge Smart Manufacturing category, recognizing APS™ as a relevant solution for Taiwan’s semiconductor ecosystem.