Dr. R. Joseph Kline
Senior Materials Engineer, National Institute of Standards and Technology
R. Joseph Kline leads the Metrology for Nanolithography project at NIST. He investigates X-ray based dimensional metrology of nanostructures and characterization of EUV photoresists for the semiconductor industry. He received his Ph.D. in Materials Science and Engineering at Stanford University in 2005 and BS and MS in Material Science and Engineering from North Carolina State University. He joined NIST as a National Research Council Postdoctoral Fellow in 2005 and has been on the staff since then. He has published more than 100 articles, 4 book chapters, and given more than 70 invited presentations. He has received the Presidential Early Career Award for Science and Engineering, the Department of Commerce Gold Award, and the Arthur S. Flemming Award.