Transforming semiconductor manufacturing & sustainability by automating preventative maintenance using robotics

11:35 am - 12:00 pm

Modern fabs have been highly automated since the introduction of overhead transport systems (OHT) in the early 2000’s, resulting in zero human intervention needed at the front of production tools. However, behind the tools, where preventative maintenance happens, there has been little to no automation developed to date. This is now changing with the introduction of cobots to mechanically automate complex tasks, bringing higher precision, dramatically reduced variability, and reduced human burden. This paper will outline the context and journey that Lam Research has begun to bring automated preventative maintenance in order to deliver higher levels of productivity and increased process control than has ever seen before. Driving productivity inherently improves sustainability.

Key Technologies Covered

Automation
Robotics and cobots
Innovation for smart manufacturing
Sustainability

Featured Speakers

Mr. Russell Dover

Managing Director, Head of Equipment Intelligence Product Development, Lam Research

Russell Dover is the Head of EI-Services Product Development at Lam Research, based in Fremont, CA, where he leads service innovation within the Services organization. His career began in the UK as a process engineer at GEC Plessey Semiconductor, followed by roles as an applications engineer and manager at KLA-Tencor in Europe before relocating to the United States in 1999 to transition into product marketing. Over the years, he contributed across multiple divisions at KLA-Tencor—including wafer and reticle inspection and Global Support Services —and later brought his expertise to ASML’s computational lithography group. With experience spanning large-scale hardware systems, major software development programs, and the creation and commercialization of service products, Russell brings a uniquely broad technical and business background to driving Equipment Intelligence solutions and next-generation service capabilities at Lam Research.