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A Technical Review of Quality Improvement Technologies Concerning Chemical Manufacturing

Thursday, September 19
1:55pm to 2:20pm

Abstract:

As the critical dimension for semiconductor devices continue to shrink below 10nm, quality advancements have become as important as technical process advancements.  The improvement of quality, from a chemical manufacturing perspective, is focused on reduction of particles, trace metals and the improved control of the manufacturing process. These improvements rely on better filter, purification and process control technology. The presentation will focus on the recent innovations in these areas as well as how MLI is advancing it's overall quality.

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