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Topic 9: How a neural network perceives IC manufacturing

Friday, September 07
2:05pm to 2:30pm

•Recent advances in A.I. technology can be applied to the field of microlithography, resulting in manufacturing processes that are more robust.  We will demonstrate how neural networks can be trained to make manufacturing processes more robust through better photomasks.  Most importantly, we will seek to improve our understanding of why these networks work and how they function.  Communication theory provides a useful perspective to increase our understanding of A.I. and microlithography.  Working from this perspective, we will visualize the inner workings of a neural network representing a lithographic process,  and gain insight into how it can be trained and debugged.

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