Topic 7: Big Data and Analytics for Continuous Improvement of Chamber Performance

Friday, September 07
11:55am to 12:20pm

•Increased productivity and faster time to solution are becoming highly critical requirements for semiconductor manufacturers. Lam Research has developed, and continues to develop, advanced services and software solutions to address these needs. The foundation of these solutions is based fundamentally on deep tool knowledge that comes from first design principles of the Lam process tools themselves. Through the systematic analysis of data from our customers’ fleets we have developed applications for optimizing fleet performance. Identifying opportunities to improve uptime, throughput and quality is achieved by centralizing the data generated from Lam tools as well as creating customized analytics.

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